Lifilimi tse tšesaane li tsoela pele ho hohela tlhokomelo ea bafuputsi.Sengoliloeng sena se fana ka lipatlisiso tsa hajoale le tse tebileng mabapi le lits'ebetso tsa bona, mekhoa e fapaneng ea ho beha, le ts'ebeliso ea nako e tlang.
"Filimi" ke lentsoe le lekanyelitsoeng bakeng sa lisebelisoa tse peli-dimensional (2D) tse fokolang haholo ho feta substrate ea eona, ebang e reretsoe ho koahela substrate kapa ho kenngoa pakeng tsa libaka tse peli.Lits'ebetsong tsa hajoale tsa indasteri, botenya ba lifilimi tsena tse tšesaane hangata bo tloha ho sub-nanometer (nm) litekanyo tsa athomo (ke hore, <1 nm) ho isa ho li-micrometer tse 'maloa (μm).Graphene ea lera le le leng e na le botenya ba athomo e le 'ngoe ea khabone (e leng ~0.335 nm).
Lifilimi li ne li sebelisetsoa merero ea ho khabisa le ea litšoantšo mehleng ea pele ho histori.Kajeno, lintho tse majabajaba le mabenyane li koahetsoe ka lifilimi tse tšesaane tsa tšepe ea bohlokoa tse kang boronse, silevera, khauta le platinum.
Tšebeliso e tloaelehileng ka ho fetisisa ea lifilimi ke tšireletso ea 'mele ea libaka tse tsoang ho abrasion, tšusumetso, li-scratches, khoholeho le ho senya.Likarolo tsa khabone e kang daemane (DLC) le MoSi2 li sebelisoa ho sireletsa lienjine tsa likoloi hore li se ke tsa senyeha le mocheso o phahameng oa mocheso o bakoang ke likhohlano lipakeng tsa likarolo tse tsamaeang ka mochini.
Lifilimi tse tšesaane li boetse li sebelisoa ho sireletsa libaka tse sebetsang hantle tse tsoang tikolohong, ebang ke oxidation kapa hydration ka lebaka la mongobo.Lifilimi tse tsamaisang tšireletso li fumane tlhokomelo e ngata masimong a lisebelisoa tsa semiconductor, li-separators tsa lifilimi tsa dielectric, li-electrode tse tšesaane tsa filimi, le ho kena-kenana le motlakase (EMI).Haholo-holo, li-transistors tsa metal oxide field effect (MOSFETs) li na le lifilimi tsa dielectric tse tsitsitseng tsa lik'hemik'hale le tsa mocheso tse kang SiO2, 'me li-complementary metal oxide semiconductors (CMOS) li na le lifilimi tsa koporo tse tsamaisang.
Li-electrode tsa filimi e tšesaane li eketsa karo-karolelano ea matla a matla ho bophahamo ba li-supercapacitor ka makhetlo a 'maloa.Ho phaella moo, lifilimi tse tšesaane tsa tšepe 'me hona joale li-MXenes (transition metal carbides, nitrides kapa carbonitrides) li-perovskite ceramic tse tšesaane lifilimi li sebelisoa haholo ho sireletsa likarolo tsa elektroniki ho kena-kenana le motlakase.
Ho PVD, thepa e shebiloeng e etsoa mouoane ebe e fetisetsoa phaposing ea vacuum e nang le substrate.Mouoane o qala ho beha holim'a substrate feela ka lebaka la condensation.Vacuum e thibela ho tsoakana ha litšila le likhohlano lipakeng tsa limolek'hule tsa mouoane le limolek'hule tse setseng tsa khase.
Moferefere o kentsoeng mouoane, mocheso oa mocheso, sekhahla sa phallo ea mouoane, le mocheso o patehileng oa thepa e shebiloeng li bapala karolo ea bohlokoa ho khethollang ho tšoana ha filimi le nako ea ho sebetsa.Mekhoa ea ho fetoha mouoane e kenyelletsa ho futhumatsa ho thibelang metsi, ho futhumatsa beam ea elektronike le, morao tjena, epitaxy ea molecular beam.
Mefokolo ea PVD e tloaelehileng ke ho se khone ho etsa mouoane o phahameng haholo oa lisebelisoa tsa ntlha ea ho qhibiliha le liphetoho tsa sebopeho tse bakoang ke thepa e kentsoeng ka lebaka la ts'ebetso ea mouoane-condensation.Magnetron sputtering ke moloko o latelang oa mokhoa oa 'mele o rarollang mathata ana.Ho magnetron sputtering, limolek'hule tse shebiloeng lia ntšoa (li fafatsoa) ka ho hlaseloa ka li-ion tse matla ka matla a khoheli a hlahisoang ke magnetron.
Lifilimi tse tšesaane li nka sebaka se ikhethileng lisebelisoa tsa sejoale-joale tsa elektroniki, tsa optical, tsa mochini, tsa photonic, tse futhumatsang le tsa makenete esita le lintho tse khabisitsoeng ka lebaka la ho ikamahanya le maemo, compactness le thepa ea ts'ebetso.PVD le CVD ke mekhoa e sebelisoang haholo ea ho beha mouoane ho hlahisa lifilimi tse tšesaane ho tloha ho li-nanometer ho isa ho li-micrometer tse seng kae.
Morphology ea ho qetela ea filimi e behiloeng e ama ts'ebetso ea eona le katleho ea eona.Leha ho le joalo, mekhoa e mesesaane ea ho beha mouoane oa filimi e hloka lipatlisiso tse ling ho bolela esale pele ka nepo thepa e tšesaane ea filimi e ipapisitseng le lisebelisoa tse teng tsa ts'ebetso, lisebelisoa tse khethiloeng, le thepa ea substrate.
Mmaraka oa lefats'e oa semiconductor o kene nakong e monate.Tlhokahalo ea theknoloji ea chip e khothalelitse le ho chechisa nts'etsopele ea indasteri, mme khaello ea hajoale ea li-chip e lebelletsoe ho tsoela pele ka nako e itseng.Mekhoa ea hajoale e kanna ea theha bokamoso ba indasteri ha sena se ntse se tsoela pele
Phapang e kholo lipakeng tsa libeteri tse thehiloeng ho graphene le libeteri tsa boemo bo tiileng ke sebopeho sa li-electrode.Le hoja li-cathodes li atisa ho fetoloa, li-allotropes tsa carbon li ka boela tsa sebelisoa ho etsa anode.
Lilemong tsa morao tjena, Inthanete ea Lintho e sebelisitsoe ka potlako hoo e batlang e le libakeng tsohle, empa e bohlokoa haholo indastering ea likoloi tsa motlakase.
Nako ea poso: Apr-23-2023