Hajoale, hoo e batlang e le lipehelo tsohle tsa koporo tse phahameng tsa boleng bo holimo tse hlokoang ke indasteri ea IC li laoloa ke lik'hamphani tse 'maloa tse kholo tsa linaha tse fapaneng.Lipheo tsohle tsa koporo ea ultrapure tse hlokoang ke indasteri ea lehae ea IC li hloka ho romelloa kantle ho naha, e seng feela theko e boima, empa hape e rarahaneng le mekhoa ea ho kenya thepa Ka hona, China e hloka ka potlako ho ntlafatsa nts'etsopele le netefatso ea lipehelo tsa sputtering tsa ultra-high (6N) tsa koporo. .Ha re shebeng lintlha tsa bohlokoa le mathata a nts'etsopele ea litebello tsa ultra-high purity (6N) copper sputtering.
1,Nts'etsopele ea lisebelisoa tsa bohloeki tse phahameng haholo
Theknoloji ea tlhoekiso ea tšepe e phahameng ea Cu, Al le Ta Chaena e hole le ea linaheng tse tsoetseng pele indastering.Hona joale, boholo ba litšepe tse hloekileng tse ka fanoang li ke ke tsa finyella litlhoko tsa boleng ba lipotoloho tse kopantsoeng bakeng sa lipehelo tsa sputtering ho latela mekhoa e tloaelehileng ea tlhahlobo ea lintho tsohle indastering.Palo ea tse kenyellelitsoeng ho sepheo e phahame haholo kapa e ajoa ka tsela e sa lekanang.Likaroloana li atisa ho thehoa ka sephaphatha nakong ea sputtering, e leng se fellang ka potoloho e khutšoanyane kapa potoloho e bulehileng ea ho hokahanya, e amang haholo ts'ebetso ea filimi.
2,Nts'etsopele ea theknoloji ea ho lokisa ea koporo ea sputtering
Nts'etsopele ea thekenoloji ea ho lokisa sepheo sa koporo ea sputtering haholo-holo e tsepamisitse maikutlo linthong tse tharo: boholo ba lijo-thollo, taolo ea tlhophiso le ho tšoana.Indasteri ea semiconductor e na le litlhoko tse phahameng ka ho fetisisa bakeng sa lipehelo tsa sputtering le lisebelisoa tse tala tse fetohang mouoane.E na le litlhoko tse thata haholo bakeng sa taolo ea boholo ba lijo-thollo tse ka holim'a metsi le mokhoa oa kristale oa sepheo.Boholo ba lijo-thollo tsa sepheo se tlameha ho laoloa ho 100μ Ka hona, M ka tlase, taolo ea boholo ba lijo-thollo le mekhoa ea ho hlahloba kamano le ho lemoha li bohlokoa haholo bakeng sa nts'etsopele ea lipehelo tsa tšepe.
3,Nts'etsopele ea tlhahlobo letekolo thekenoloji
Bohloeki bo phahameng ba sepheo se bolela ho fokotseha ha litšila.Nakong e fetileng, plasma (ICP) le atomic absorption spectrometry li ne li sebelisetsoa ho fumana litšila, empa lilemong tsa morao tjena, tlhahlobo ea boleng ba glow discharge (GDMS) e nang le kutlo e phahameng e 'nile ea sebelisoa butle-butle e le tekanyetso. mokhoa.Mokhoa o setseng oa ho hanyetsa mokhoa oa RRR o sebelisoa haholo-holo bakeng sa qeto ea bohloeki ba motlakase.Boikemisetso ba eona ke ho lekola bohloeki ba tšepe ea motheo ka ho lekanya tekanyo ea ho hasana ha litšila ka elektronike.Hobane ke ho lekanya ho hanyetsa mocheso oa kamore le mocheso o tlase haholo, ho bonolo ho nka palo.Lilemong tsa morao tjena, e le ho hlahloba moelelo oa litšepe, lipatlisiso tsa bohloeki bo phahameng ka ho fetisisa li sebetsa haholo.Tabeng ena, boleng ba RRR ke tsela e molemohali ea ho lekola bohloeki.
Nako ea poso: May-06-2022