Joalo ka ha bohle re tseba, vacuum evaporation le ion sputtering hangata li sebelisoa ho koahela vacuum.Phapano ke efe lipakeng tsa ho roala mouoane le ho kolobisa ka metsi?Ka mor'a moo, litsebi tsa theknoloji tse tsoang RSM li tla arolelana le rona.
Vacuum evaporation coating ke ho futhumatsa thepa e lokelang ho fetoha mouoane ho mocheso o itseng ka mocheso oa ho hanyetsa kapa lebone la elektrone le bombardment ea laser sebakeng se nang le vacuum degree e seng ka tlase ho 10-2Pa, e le hore matla a ho sisinyeha a mocheso a limolek'hule. liathomo ka lintho tse bonahalang feta matla a tlamang a holim'a metsi, e le hore palo e kholo ea limolek'hule kapa liathomo e mouoane kapa sublimate, 'me ka ho toba precipitate ka substrate ho etsa filimi.Ion sputtering coating e sebelisa lebelo le phahameng la li-ion tse ntle tse hlahisoang ke ho tsoa ha khase tlas'a ts'ebetso ea lebala la motlakase ho hlasela sepheo e le cathode, e le hore liathomo kapa limolek'hule tse ho sepheo li phonyohe 'me li oele holim'a sekhechana sa ho sebetsa. filimi e hlokahalang.
Mokhoa o sebelisoang ka ho fetisisa oa ho roala mouoane oa vacuum ke ho futhumatsa ho hanyetsa, ho nang le melemo ea sebopeho se bonolo, theko e tlaase le ts'ebetso e bonolo;Bothata ke hore ha bo loketse litšepe tse refractory le lisebelisoa tsa dielectric tse hanyetsanang le mocheso o phahameng.Ho futhumala ha mahlaseli a elektrone le ho futhumatsa laser ho ka hlōla mefokolo ea ho futhumatsa ho hanyetsa.Ha ho futhumatsoa ka mocheso oa elektrone, sefate sa elektronike se tsepamisitsoeng se sebelisoa ho futhumatsa ka ho toba thepa e phunyeletsoeng, 'me matla a kinetic a sefate sa elektronike a fetoha matla a mocheso, a etsang hore thepa e fetohe mouoane.Ho futhumatsa ka laser ho sebelisa laser ea matla a phahameng e le mohloli oa ho futhumatsa, empa ka lebaka la theko e phahameng ea laser ea matla a phahameng, e ka sebelisoa feela lilaboratoring tse 'maloa tsa lipatlisiso hajoale.
Theknoloji ea sputtering e fapane le theknoloji ea vacuum evaporation."Sputtering" e bolela ketsahalo ea hore likaroloana tse qosoang li otla bokaholimo bo tiileng (sepheo) ebe li etsa liathomo tse tiileng kapa limolek'hule ho tsoa holimo.Bongata ba likaroloana tse ntšitsoeng li boemong ba athomo, boo hangata bo bitsoang liathomo tse sputtered.Likaroloana tse sputtered tse sebelisetsoang ho bomola sepheo e ka ba lielektrone, li-ion kapa likaroloana tse sa nke lehlakore.Hobane li-ion ho bonolo ho potlakisa ka tlas'a lebala la motlakase ho fumana matla a kinetic a hlokahalang, boholo ba bona ba sebelisa li-ion joalo ka likaroloana tse hlasetsoeng.Ts'ebetso ea ho fafatsa e ipapisitse le ho tsoa ha khanya, ke hore, li-ion tsa sputtering li tsoa ho tsoa khase.Litheknoloji tse fapaneng tsa sputtering li sebelisa mekhoa e fapaneng ea ho ntša khanya.DC diode sputtering e sebelisa DC glow discharge;Triode sputtering ke phallo e khanyang e tšehetsoang ke cathode e chesang;RF sputtering e sebelisa RF glow discharge;Magnetron sputtering ke phallo e khanyang e laoloang ke matla a khoheli a annular.
Ha ho bapisoa le sekoaelo sa vacuum evaporation, ho roala ha metsi ho na le melemo e mengata.Ka mohlala, ntho leha e le efe e ka fafatsoa, haholo-holo likarolo le metsoako e nang le ntlha e phahameng ea ho qhibiliha le khatello e tlaase ea mouoane;Ho khomarela pakeng tsa filimi ea sputtered le substrate ho molemo;Boima bo phahameng ba filimi;Botenya ba filimi bo ka laoloa mme ho pheta-pheta ho molemo.Bothata ke hore lisebelisoa li rarahane 'me li hloka lisebelisoa tse phahameng tsa motlakase.
Ho feta moo, motsoako oa mokhoa oa mouoane le mokhoa oa sputtering ke ion plating.Melemo ea mokhoa ona ke hore filimi e fumanoeng e na le sekhomaretsi se matla le substrate, tekanyo e phahameng ea deposition le high density ea filimi.
Nako ea poso: Jul-20-2022