Sputtering titanium alloy target le tšepe ea titanium e entsoe ka titanium, kahoo tlhahisoleseding e batla e tšoana, empa phapang pakeng tsa tse peli e itšetlehile haholo ka sepheo sa sputtering titanium alloy e entsoe ka tšepe ea titanium ka litsela tse 'maloa,' me titanium e hlaha ka tlhaho e le Titanium ore
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一、Ti e shebiloeng bakeng sa lipotoloho tse kopaneng
Litlhoko tsa sputtering titanium alloy targets li fapane pakeng tsa li-circuits tse sa kopanngoeng le li-circuits tse kopantsoeng.Ka kakaretso, lipotoloho tse kopantsoeng li na le litlhoko tse phahameng tsa data ea ho roala, tse kang bohloeki bo phahameng, boholo ba lijo-thollo tse nyenyane le ho nepahala ha tekanyo e nepahetseng.Bohloeki ba lipakane tsa titanium lipotolohong tse kopantsoeng ke tse kholo ho feta 99.995%, e leng e phahameng ho feta e sebelisoang ho sa kopane. li-circuits, tse bontšang hore litšebeliso tse fapaneng tsa litlhoko tsa sepheo sa titanium li fapane haholo.
二、Ti target bakeng sa pontšo ea phanele e bataletseng
Lipheo tsa alloy tsa Titanium tse sebelisoang lipontšong tse bataletseng li kenyelletsa ponts'o ea kristale ea metsi, ponts'o ea plasma, ponts'o ea electroluminescence le ponts'o ea tšimo. lipontšo.Ho hloeka ha lipehelo tsa alloy ea titanium bakeng sa lipontšo tse bataletseng hangata ho feta 99.9%.
三、Ti lipehelo bakeng sa thepa e khabisitsoeng
Tšebeliso e phahameng ea titanium alloy target material e na le khanyetso e ntle ea moea, tšebeliso ea nako e telele moeeng ha e fetole 'mala, ho etsa bonnete ba hore' mala oa pele oa titanium le ho kopana le batho ha se allergic le litšobotsi tse ling tse babatsehang.Ka hona, bohloeki bo phahameng ba titanium bo ka boela ba sebelisoa e le lisebelisoa tse khabisitsoeng, lilemong tsa morao tjena, tse kang lipetja, lioache le likhalase le mekhabiso e meng e nang le bohloeki ba titanium e fihlile boemong ba 5N.
四、Ti e shebana le lits'ebetso tsa ho pompa li-vacuum tse phahameng haholo
Joaloka tšepe e sebetsang ka lik'hemik'hale, titanium e ka itšoara ka likarolo tse ngata le metsoako ka mocheso o phahameng.Sepheo se phahameng sa ho hloeka ha titanium alloy se na le matla a matla a adsorption bakeng sa likhase tse sebetsang (joalo ka O2, N2, CO, CO2, mouoane oa metsi ka holimo ho 650 ° C), 'me filimi ea Ti e fetohang mouoane leboteng la pompo e ka theha bokaholimo bo nang le ts'ebetso e phahameng ea adsorption. .Thepa ena e etsa hore Ti e sebelisoe haholo e le setsi sa motlakase tsamaisong ea ho ntša khase ea ultra-high vacuum. Haeba e sebelisetsoa ho ntlafatsa pompo, pompo ea sputtering ion, joalo-joalo, e ka etsa hore khatello ea ho qetela ea ts'ebetso ea sputtering ion pump e be tlaase ho 10-9PA.
Nako ea poso: Apr-25-2022